ECE6221
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ECE6221 - Micromachining (3 cr)
Electrical and Computer EngineeringEN - J & M Price College of Eng.
Description
Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques. A weekly lab and a review of micromachining applications is included. Graduate students only. Extra work required.
Minimum Credits
3
Maximum Credits
3
Repeat for Credit
No
Required Requisite(s):
Prerequisites: Instructor Consent.
Semesters Typically Offered
All Terms
Cross Listed Courses
Fee Amount
$220
Course Fee Usage
Specialized Facilities