ME EN6050

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Fundamentals of Micromachining Processes

Mechanical Engineering EN - J & M Price College of Eng.

Description

Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques. A weekly lab and a review of micromachining applications is included. Graduate students only. Extra work required.

Semester Credit Hours

Minimum Credits

Maximum Credits

Repeat for Credit

Required Requisite(s):

008422

Semesters Typically Offered

All Terms

Cross Listed Courses

Fee Amount

$220

Course Fee Usage

Specialized Facilities